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Annealing Equipment - List of Manufacturers, Suppliers, Companies and Products

Annealing Equipment Product List

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Annealing device "Variable Atmosphere Heat Treatment Device"

Capable of processing various substrates such as wafers and glass; a variable atmosphere heat treatment device compatible with a wide range of applications (supports sample testing in O2 or H2 atmosphere annealing).

We offer a rapid temperature rise and fall type "horizontal annealing device" that can be processed in vacuum, oxygen atmosphere (at atmospheric pressure), and reducing atmosphere (at atmospheric pressure). It is capable of processing various substrates (wafers, ceramics, glass, mounted substrates) up to 6 inches, and has a proven track record in applications such as annealing of thin films and wafers, firing of nano metal pastes, and curing of organic materials. For those who wish to evaluate our equipment, we offer sample testing. Please contact us for details on specifications and available test contents. 【Features】 ■ Uniform heating treatment in various atmospheres (vacuum, N2, O2, H2) (up to 900°C) ■ Rapid cooling through the movement of the heating furnace body ■ Processing in a clean atmosphere using quartz tubes ■ Wide range of application support *For more details, please feel free to contact us.

  • Other physicochemical equipment
  • Heating device

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[Custom-made Specialized Equipment Manufacturing Case] Annealing Device

We will introduce a case of achieving miniaturization and weight reduction of a device for annealing (baking) silicon thin films.

We would like to introduce a case of modifying an "annealing device" for the semiconductor industry. It was necessary to renew the electrical equipment of the existing machine due to aging. The machine operates by creating a low vacuum in the chamber and injecting nitrogen for transport, while maintaining vacuum pressure when moving from the stocker to the annealing stage, and it was requested to design it so that only the stocker part can be removed, as well as to arrange cleaning windows for easier cleaning. We achieved miniaturization and weight reduction through the modification of the existing machine, meeting the requirements. [Case Overview] ■ Issues - Maintain vacuum pressure when moving from the stocker to the annealing stage - Design a structure that allows only the stocker part to be removed - Arrange cleaning windows for easier cleaning *For more details, please feel free to contact us.

  • Other machine tools

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